設(shè)備名稱 Equipment name

管式低壓氧化退火設(shè)備  Horizontal Low Pressure Oxidation/Annealing Equipment

設(shè)備型號 Equipment Model

DOA-420/DOA-420L/DOA-420MAX

設(shè)備用途 Equipment Application

低壓氧化、退火。
Low Pressure oxidation, annealing.

技術(shù)特點(diǎn)  Features 

1、大產(chǎn)能。

High throughput.

2、配套相關(guān)專利技術(shù)，可兼容或升級硼擴(kuò)散工藝。
Patented technology, compatible or upgradeable with boron diffusion process.

3、獨(dú)特雙嵌套爐門結(jié)構(gòu)。
Unique double-layer-nested furnace door structure.

4、高速平穩(wěn)整體模組推舟機(jī)構(gòu)。
High-speed and stable integral module boat pushing mechanism.

設(shè)備參數(shù)  Parameters