設(shè)備名稱(chēng) Equipment Name

HJT板式等離子體增強(qiáng)化學(xué)氣相沉積設(shè)備  HJT In-line PECVD

設(shè)備型號(hào) Equipment Model

PD-1022/UD

設(shè)備用途 Equipment Application

制備本征及摻雜非晶硅薄膜。

Intrinsic film deposition & a-si film doping.

設(shè)備工藝  Processes

工藝氣體在射頻RF電磁場(chǎng)環(huán)境中電離相互反應(yīng)，在襯底上沉積出相應(yīng)的薄膜材料。

Ionized precursor gases deposit thin films on a substrate.

技術(shù)特點(diǎn)  Features

1、較小反射功率的快速啟輝、均勻穩(wěn)定大面積成膜。

Quick RF ignition with least reflect power for uniform and stable film deposition.

2、成熟穩(wěn)定的多點(diǎn)饋入射頻RF技術(shù)、技術(shù)兼容性和產(chǎn)品升級(jí)。

Matured and stable multi-feed in RF technology compatible for even large process chamber.

3、腔體內(nèi)反應(yīng)間距可調(diào)、靈活的工藝窗口。

Continuous adjustable gas between diffuser and substrate providing flexible process possibilities.

4、大產(chǎn)能低成本、定制設(shè)備結(jié)構(gòu)。

High throughput with relative low cost, with capability of customized product design.

5、模塊化設(shè)計(jì)便于安裝和維護(hù)、高標(biāo)準(zhǔn)的安全設(shè)計(jì)思想。

Modularized design for easy installation and maintenance, together with highest safety protocol from design to fabrication.

設(shè)備參數(shù)  Parameters