Equipment Name:

Horizontal PECVD (Two-In-One)

Equipment Model:

PD-520/PD-520L/PD-520MAX

Equipment Application:

AlOx+SiN deposition.

Features:

1、The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.  

2、Optimal throughout solution: two-in-one configuration. 

Parameters: